Semiconductor main vacuum valves and technical characteristics-
Semiconductor main vacuum valves and technical characteristics
2025-01-09
Valves are the core components in semiconductor vacuum systems and fluid systems, which play the role of opening and closing, controlling flow/direction, regulating pressure, etc. There are many kinds of valves, such as valves in vacuum systems can be divided into isolation valves, control valves, transmission valves, etc. In the fluid system, diaphragm valves and pressure regulating valves are needed. Semiconductor valve requirements are very strict, the tightness, vacuum, cleanliness and other parameters have very high requirements, in the selection of materials, surface treatment and other aspects have brought greater difficulty to manufacturers.