Manufacturing semiconductor chips must be carried out in a vacuum environment, which can avoid oxidation and pollution, and ensure chip quality and performance. At normal temperature and pressure, the environment contains a large number of impure substances, and in the semiconductor manufacturing process, the chip is susceptible to oxidation and pollution, which seriously affects the chip quality and production efficiency.

General vacuum pump applications can be divided into 8 categories according to different requirements and application areas of vacuum degree, including crude vacuum, process vacuum, industrial vacuum, semiconductor, thin film deposition (except semiconductor), solar energy, instrument manufacturing, and scientific research.

The corresponding products are also different, high/ultra-vacuum corresponding to low temperature pumps, molecular pumps, sputtering ion pumps, titanium sublimation pumps, diffusion pumps, etc. The middle vacuum mainly corresponds to dry pump, two-stage rotary vane pump, Roots pump, oil booster pump, water vapor jet pump; Coarse/low vacuum corresponding to single-stage rotary vane pump, slide valve pump, liquid ring pump, reciprocating vacuum pump. At present, the semiconductor field is the largest downstream market for vacuum equipment applications, accounting for 38% of the total market size.

The vacuum system consists of vacuum pump, control system, gas storage tank, pipeline installation and other components, including molecular pump, cold pump, dry pump, isolation valve, control valve, transmission valve, O-Ring sealing ring and many other core semiconductor components.

The valve is an important part of the vacuum system and fluid system of semiconductor equipment, which plays the role of opening and closing, controlling flow/flow direction, adjusting pressure, etc., and is widely used in etching machines, ion implantation machines, CMP polishing equipment, etc. Due to the particularity of semiconductor equipment, semiconductor valves have very high requirements for cleanliness, sealing, pressure resistance and corrosion resistance.

According to the application environment, the valve can be divided into vacuum valve and fluid system valve. The vacuum valve is a valve used in the vacuum system, and its role is usually to isolate the vacuum area (such as the process chamber) or control the amount of gas in and out; The fluid system valve is used in the fluid system of the valve, mainly plays the fluid switch cut-off, fluid flow regulation, fluid flow direction change and other three roles.

O-ring, Chinese name O-ring, is a rubber sealing ring with a round cross-section, its main function is to seal, such as gas seal, water seal, oil seal and so on. General rubber O-ring is easy to wear, chemical corrosion resistance and gas penetration resistance is poor.

Because it is cheap, simple to manufacture, reliable in function, and simple in installation requirements, it is the most common seal. The O-ring can withstand tens of megabytes of pressure and can be used in static applications or dynamic applications where there is relative motion between components.

O-rings are suitable for a variety of sealing forms, including static sealing and dynamic sealing. Suitable for various uses of materials, sizes and grooves have been standardized, interchangeability. The mode of motion also includes rotational motion, axial reciprocating motion, or combined motion (such as rotary reciprocating combined motion).

In addition to the above two advantages, O-rings have strong adaptability to oil, water, gas, chemical media or other mixed media. Through the selection of suitable rubber materials and appropriate formula design, to achieve the effective sealing effect of oil, water, air, gas and various chemical media. The operating temperature range is wide (-60°C ~ +220°C), and the pressure can reach 1500Kg/cm2 when fixed use (and the reinforcement ring is used).

In addition, the O-ring section structure is extremely simple, and has a self-sealing effect, sealing performance is reliable. Because the O-ring itself and the installation site structure are extremely simple and standardized, installation and replacement are very easy. Low cost: dynamic friction resistance is relatively small.